Known interstitial lung disease, interstitial fibrosis, or history of tyrosine kinase inhibitor-induced pneumonitis No known interstitial fibrosis or interstitial lung disease History of interstitial lung disease (e.g., pneumonitis or pulmonary fibrosis) Patients with previous history or active interstitial lung disease or pulmonary fibrosis, or a history of other clinically significant lung diseases Known history or confirmation of active pneumonia, pneumonitis, symptomatic interstitial lung disease, or definitive evidence of interstitial lung disease described on CT scan, MRI, or chest x-ray in asymptomatic patients; dyspnea at rest requiring current continuous oxygen therapy. Current or history of idiopathic pulmonary fibrosis, interstitial lung disease, or organizing pneumonia. Subjects with interstitial lung disease (ILD) (including pneumonitis, bronchiolitis obliterans organizing pneumonia [BOOP], and pulmonary fibrosis). Patients with blood oxygen saturation < % at rest; patients must not have symptomatic interstitial lung disease, pneumonitis, or known pulmonary fibrosis History of extensive, disseminated, bilateral or presence of Grade or interstitial fibrosis or interstitial lung disease Have evidence suggesting pulmonary fibrosis or interstitial pneumonia. History of interstitial lung disease (eg, pneumonitis or pulmonary fibrosis) or evidence of interstitial lung disease on baseline chest computed tomography (CT) scan Presence of cavitation of central pulmonary lesion, or radiographic evidence of pneumonitis or other extensive bilateral lung disease such as interstitial lung disease History of interstitial pneumonitis or pulmonary fibrosis, or evidence of interstitial pneumonitis or pulmonary fibrosis on baseline chest CT scan Has any history of interstitial lung disease (pulmonary fibrosis or severe radiation pneumonitis) or is suspected to have such disease by imaging during screening. History of extensive, disseminated, bilateral or presence of grade or interstitial fibrosis or interstitial lung disease including pneumonitis, hypersensitivity pneumonitis, interstitial pneumonia, interstitial lung disease, obliterative bronchiolitis or pulmonary fibrosis; patients with history of prior radiation pneumonitis are not excluded Participants with interstitial pneumonia or extensive and symptomatic fibrosis of the lungs History of symptomatic idiopathic pulmonary fibrosis or interstitial lung disease GROUP :\r\n* Limited cutaneous scleroderma and SSc-related pulmonary disease with FVC < % or hemoglobin-adjusted DLCO < % of predicted\r\n* AND evidence of alveolitis/interstitial lung disease by high-resolution chest CT scan and/or by BAL (interstitial lung disease may be nonspecific interstitial pneumonia [NSIP] or usual interstitial pneumonia [UIP]; A bronchoalveolar lavage [BAL] should be done to confirm the findings of alveolitis only if the high resolution CT scan [HRCT] fails to show findings typically associated with systemic sclerosis changes [ground glass, NSIP, UIP, SSc related interstitial lung disease])\r\n* Alveolitis by BAL cell count will be defined based on a BAL cell differential count (> % neutrophils and/or > % eosinophils) from any lavaged lobe History of extensive interstitial lung disease, e.g., pneumonitis or pulmonary fibrosis or any evidence of extensive interstitial lung disease on baseline chest computed tomography (CT) scan No interstitial pneumonia or extensive and symptomatic interstitial fibrosis of the lung Interstitial pneumonia or interstitial fibrosis of the lung, which in the opinion of the site investigator could compromise the subject or the study History of interstitial lung disease e.g. pneumonitis or pulmonary fibrosis, or any evidence of interstitial lung disease on baseline chest CT scan\r\n* For the NSCLC expanded cohort only: scarring from previous radiation therapy or pneumonia allowed Known history of, or any evidence of interstitial lung disease, non-infectious pneumonitis, pulmonary fibrosis diagnosed based on imaging or clinical findings, or uncontrolled systemic diseases, including diabetes, hypertension, acute lung diseases, etc Interstitial lung disease or pulmonary fibrosis Known history of active pneumonia, pneumonitis, symptomatic interstitial lung disease, or definitive evidence of interstitial lung disease described on CT scan, MRI, or chest x-ray in asymptomatic patients; dyspnea at rest requiring current continuous oxygen therapy. Idiopathic pulmonary fibrosis or other severe interstitial lung disease that requires oxygen therapy or is thought to require oxygen therapy within year prior to step registration Patients with known interstitial fibrosis or interstitial lung disease are not eligible Patients with known interstitial fibrosis or interstitial lung disease. History of extensive, disseminated, bilateral or presence of Grade or interstitial fibrosis or interstitial lung disease including a history of pneumonitis, hypersensitivity pneumonitis, interstitial pneumonia, interstitial lung disease, obliterative bronchiolitis and pulmonary fibrosis. History of interstitial lung disease (e.g. pneumonitis or pulmonary fibrosis) or evidence of interstitial lung disease on baseline chest CT scan Known interstitial lung disease, interstitial fibrosis, or history of tyrosine kinase inhibitor-induced pneumonitis. No symptomatic pulmonary fibrosis or interstitial pneumonitis >= grade Symptomatic interstitial lung disease or definitive evidence of interstitial lung disease described on CT scan, MRI, or chest x-ray in asymptomatic patients; dyspnea at rest requiring current continuous oxygen. Interstitial pneumonia or extensive and symptomatic interstitial fibrosis of the lung. History of interstitial lung disease (e.g. pneumonitis or pulmonary fibrosis) or evidence of interstitial lung disease on baseline chest computed tomography (CT) scan Patients must not have interstitial pneumonia or extensive symptomatic interstitial fibrosis of the lung Presence of interstitial lung disease, pulmonary fibrosis, or pulmonary hypersensitivity reaction Symptomatic interstitial lung disease or definitive evidence of interstitial lung disease described on CT scan, MRI, or chest x-ray in asymptomatic patients; dyspnea at rest requiring current continuous oxygen therapy. History of interstitial lung disease e.g. pneumonitis or pulmonary fibrosis or evidence of interstitial lung disease on baseline chest computed tomography (CT) scan Interstitial pneumonia or extensive and symptomatic interstitial fibrosis of the lung History of interstitial lung disease e.g. pneumonitis or pulmonary fibrosis or evidence of interstitial lung disease on baseline chest computed tomography (CT) scan History of extensive interstitial lung disease e.g. pneumonitis or pulmonary fibrosis or any evidence of extensive interstitial lung disease on baseline chest computed tomography (CT) scan Has a history of pneumonitis or idiopathic pulmonary fibrosis, or evidence of interstitial lung disease. History of extensive disseminated interstitial fibrosis or any grade of interstitial lung disease. Patients with a prior diagnosis of interstitial lung disease or pulmonary fibrosis History of interstitial lung disease e.g. pneumonitis or pulmonary fibrosis or evidence of interstitial lung disease on baseline chest computed tomography (CT) scan Known preexisting interstitial lung disease, interstitial pulmonary fibrosis, or connective tissue disorder associated lung disease History of or known presence of extensive, disseminated/bilateral or Grade or interstitial fibrosis or interstitial lung disease, including a history of pneumonitis, hypersensitivity pneumonitis, interstitial pneumonia, interstitial lung disease, obliterative bronchiolitis, or pulmonary fibrosis, but not including a history of prior radiation pneumonitis. Patients with clinically significant lung disease requiring oxygen therapy (eg, COPD). History of interstitial lung disease e.g. pneumonitis or pulmonary fibrosis or evidence of interstitial lung disease on baseline chest computed tomography (CT) scan Clinically significant lung disease (including pneumonitis, interstitial lung disease, idiopathic pulmonary fibrosis, cystic fibrosis, active infection/ history of opportunistic infections) Patients with specific contraindications to the use of anti-EGFR therapy such as pulmonary fibrosis, interstitial pneumonia history Patients with a documented history of interstitial lung disease or pulmonary fibrosis Subjects with a history or evidence of interstitial pneumonitis or pulmonary fibrosis Patients with a history or evidence of interstitial pneumonitis or pulmonary fibrosis Has any history of interstitial lung disease (pulmonary fibrosis or severe radiation pneumonitis) or is suspected to have such disease by imaging during screening History of extensive, disseminated, bilateral or presence of grade or interstitial fibrosis or interstitial lung disease including pneumonitis, hypersensitivity pneumonitis, interstitial pneumonia, interstitial lung disease, obliterative bronchiolitis and pulmonary fibrosis; patients with history of prior radiation pneumonitis are not excluded History of extensive disseminated/bilateral or known presence of interstitial fibrosis or interstitial lung disease, including a history of pneumonitis, hypersensitivity pneumonitis, interstitial pneumonia, interstitial lung disease, obliterative bronchiolitis, and pulmonary fibrosis, but not history of prior radiation pneumonitis.